An Experimental Study of Microchannel and Micro-Pin-Fin Based On-Chip Cooling Systems with Silicon-to-Silicon Direct Bonding

Yunlong Qiu, Wenjie Hu, Changju Wu, Weifang Chen. An Experimental Study of Microchannel and Micro-Pin-Fin Based On-Chip Cooling Systems with Silicon-to-Silicon Direct Bonding. Sensors, 20(19):5533, 2020. [doi]

@article{QiuHWC20,
  title = {An Experimental Study of Microchannel and Micro-Pin-Fin Based On-Chip Cooling Systems with Silicon-to-Silicon Direct Bonding},
  author = {Yunlong Qiu and Wenjie Hu and Changju Wu and Weifang Chen},
  year = {2020},
  doi = {10.3390/s20195533},
  url = {https://doi.org/10.3390/s20195533},
  researchr = {https://researchr.org/publication/QiuHWC20},
  cites = {0},
  citedby = {0},
  journal = {Sensors},
  volume = {20},
  number = {19},
  pages = {5533},
}