An Experimental Study of Microchannel and Micro-Pin-Fin Based On-Chip Cooling Systems with Silicon-to-Silicon Direct Bonding

Yunlong Qiu, Wenjie Hu, Changju Wu, Weifang Chen. An Experimental Study of Microchannel and Micro-Pin-Fin Based On-Chip Cooling Systems with Silicon-to-Silicon Direct Bonding. Sensors, 20(19):5533, 2020. [doi]

Abstract

Abstract is missing.