Xiaotun Qiu, Jie Zhu, J. Oiler, Cunjiang Yu, Ziyu Wang, Hongyu Yu. Film Bulk Acoustic-wave Resonator (FBAR) based humidity sensor. In 5th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010, Xiamen, China, January 20-23, 2010. pages 445-449, IEEE, 2010. [doi]
@inproceedings{QiuZOYWY10,
title = {Film Bulk Acoustic-wave Resonator (FBAR) based humidity sensor},
author = {Xiaotun Qiu and Jie Zhu and J. Oiler and Cunjiang Yu and Ziyu Wang and Hongyu Yu},
year = {2010},
doi = {10.1109/NEMS.2010.5592429},
url = {http://dx.doi.org/10.1109/NEMS.2010.5592429},
researchr = {https://researchr.org/publication/QiuZOYWY10},
cites = {0},
citedby = {0},
pages = {445-449},
booktitle = {5th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010, Xiamen, China, January 20-23, 2010},
publisher = {IEEE},
}