Xiaotun Qiu, Jie Zhu, J. Oiler, Cunjiang Yu, Ziyu Wang, Hongyu Yu. Film Bulk Acoustic-wave Resonator (FBAR) based humidity sensor. In 5th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010, Xiamen, China, January 20-23, 2010. pages 445-449, IEEE, 2010. [doi]
Abstract is missing.