A Nano-g MOEMS Accelerometer Featuring Electromagnetic Force Balance With 157-dB Dynamic Range

Ziqiang Qu, Hao Ouyang, Wen Xiong, Qiangwei Xu, Yuan Wang, Huafeng Liu 0002. A Nano-g MOEMS Accelerometer Featuring Electromagnetic Force Balance With 157-dB Dynamic Range. IEEE Transactions on Industrial Electronics, 71(6):6418-6426, June 2024. [doi]

Abstract

Abstract is missing.