Peng Qu, Hongwei Qu. A CMOS fuse for safe release of CMOS-MEMS devices. In 2017 IEEE SENSORS, Glasgow, United Kingdom, October 29 - November 1, 2017. pages 1-3, IEEE, 2017. [doi]
@inproceedings{QuQ17,
title = {A CMOS fuse for safe release of CMOS-MEMS devices},
author = {Peng Qu and Hongwei Qu},
year = {2017},
doi = {10.1109/ICSENS.2017.8233932},
url = {https://doi.org/10.1109/ICSENS.2017.8233932},
researchr = {https://researchr.org/publication/QuQ17},
cites = {0},
citedby = {0},
pages = {1-3},
booktitle = {2017 IEEE SENSORS, Glasgow, United Kingdom, October 29 - November 1, 2017},
publisher = {IEEE},
isbn = {978-1-5090-1012-7},
}