G. Quiroz-Merino, R. Sanchez-Fraga, H. Baez-Medina, Victor H. Ponce-Ponce, Salvador Mendoza-Acevedo. Design and simulation of polysilicon micro tuning fork for ultrasonic frequency operation. In 12th International Conference on Electrical Engineering, Computing Science and Automatic Control, CCE 2015, Mexico City, Mexico, October 28-30, 2015. pages 1-5, IEEE, 2015. [doi]
Abstract is missing.