Nanoscale multilayers as optical elements for X-ray photolitography

Nikola Radic, Kresimir Salamon, Pavo Dubcek, Ognjen Milat, Marko Jercinovic, Goran Drazic, Sigrid Bernstorff. Nanoscale multilayers as optical elements for X-ray photolitography. In MIPRO, 2011 Proceedings of the 34th International Convention, Opatija, Croatia, 23-27 May, 2011. pages 27-30, IEEE, 2011. [doi]

Abstract

Abstract is missing.