Sparse field level set method for non-convex Hamiltonians in 3D plasma etching profile simulations

Branislav Radjenovic, Jae Koo Lee, Marija Radmilovic-Radjenovic. Sparse field level set method for non-convex Hamiltonians in 3D plasma etching profile simulations. Computer Physics Communications, 174(2):127-132, 2006. [doi]

Abstract

Abstract is missing.