3 dielectrics of different thickness

J. M. Rafí, M. B. González, K. Takakura, I. Tsunoda, M. Yoneoka, O. Beldarrain, M. Zabala, F. Campabadal. 3 dielectrics of different thickness. Microelectronics Reliability, 53(9-11):1333-1337, 2013. [doi]

@article{RafiGTTYBZC13,
  title = {3 dielectrics of different thickness},
  author = {J. M. Rafí and M. B. González and K. Takakura and I. Tsunoda and M. Yoneoka and O. Beldarrain and M. Zabala and F. Campabadal},
  year = {2013},
  doi = {10.1016/j.microrel.2013.07.023},
  url = {http://dx.doi.org/10.1016/j.microrel.2013.07.023},
  researchr = {https://researchr.org/publication/RafiGTTYBZC13},
  cites = {0},
  citedby = {0},
  journal = {Microelectronics Reliability},
  volume = {53},
  number = {9-11},
  pages = {1333-1337},
}