Numerical backstepping for diameter control of silicon ingots in the Czochralski process

Parsa Rahmanpour, Morten Hovd. Numerical backstepping for diameter control of silicon ingots in the Czochralski process. In Proceedings of the 51th IEEE Conference on Decision and Control, CDC 2012, December 10-13, 2012, Maui, HI, USA. pages 7013-7017, IEEE, 2012. [doi]

Abstract

Abstract is missing.