An Improved SOI-on-Glass Fabrication Method of Large-Area Sheeting of MEMS Isolator

Longqi Ran, Yichuan Wu, Jiangbo He, Binlei Cao, Zongda Hu, Wu Zhou 0003. An Improved SOI-on-Glass Fabrication Method of Large-Area Sheeting of MEMS Isolator. In 18th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2023, Jeju Island, Korea, Republic of, May 14-17, 2023. pages 62-65, IEEE, 2023. [doi]

Abstract

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