A state-of-art review and a simple meta-analysis on deterministic scheduling of diffusion furnaces in semiconductor manufacturing

M. Vimala Rani, Muthu Mathirajan. A state-of-art review and a simple meta-analysis on deterministic scheduling of diffusion furnaces in semiconductor manufacturing. Int. J. Prod. Res., 61(16):5744-5771, August 2023. [doi]

Abstract

Abstract is missing.