Deep learning-guided surface characterization for autonomous hydrogen lithography

Mohammad Rashidi, Jeremiah Croshaw, Kieran Mastel, Marcus Tamura, Hedieh Hosseinzadeh, Robert A. Wolkow. Deep learning-guided surface characterization for autonomous hydrogen lithography. Mach. Learn. Sci. Technol., 1(2):25001, 2020. [doi]

@article{RashidiCMTHW20,
  title = {Deep learning-guided surface characterization for autonomous hydrogen lithography},
  author = {Mohammad Rashidi and Jeremiah Croshaw and Kieran Mastel and Marcus Tamura and Hedieh Hosseinzadeh and Robert A. Wolkow},
  year = {2020},
  doi = {10.1088/2632-2153/ab6d5e},
  url = {https://doi.org/10.1088/2632-2153/ab6d5e},
  researchr = {https://researchr.org/publication/RashidiCMTHW20},
  cites = {0},
  citedby = {0},
  journal = {Mach. Learn. Sci. Technol.},
  volume = {1},
  number = {2},
  pages = {25001},
}