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Deep learning-guided surface characterization for autonomous hydrogen lithography

Mohammad Rashidi, Jeremiah Croshaw, Kieran Mastel, Marcus Tamura, Hedieh Hosseinzadeh, Robert A. Wolkow. Deep learning-guided surface characterization for autonomous hydrogen lithography. Mach. Learn. Sci. Technol., 1(2):25001, 2020. [doi]

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