A Linear Non-Contact Measurement of Dielectric Thickness with μm-Resolution

Surbhika Rastogi, Surya Varchasvi Devaraj, Rajesh Zele. A Linear Non-Contact Measurement of Dielectric Thickness with μm-Resolution. In 2023 IEEE SENSORS, Vienna, Austria, October 29 - Nov. 1, 2023. pages 1-4, IEEE, 2023. [doi]

Abstract

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