Technology of fabrication and functional validations of planar-Nothing On Insulator devices with oxide instead vacuum

Cristian Ravariu, Florin Babarada, Dan Mihaiescu, Elena Manea, C. Parvulescu, A. Popescu. Technology of fabrication and functional validations of planar-Nothing On Insulator devices with oxide instead vacuum. In 2018 10th International Conference on Electronics, Computers and Artificial Intelligence (ECAI), Iasi, Romania, June 28-30, 2018. pages 1-4, IEEE, 2018. [doi]

Abstract

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