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Qinghua Ren, Junhong Chen, Xin Liu, Songsong Zhang, Yuandong Gu. Design and 3D FEM Analysis of a Flexible Piezoelectric Micromechanical Ultrasonic Transducer Based on Sc-Doped AlN Film. Sensors, 22(21):8100, 2022. [doi]
Abstract is missing.