Compact interferometric displacement gauge with sub-nanometer resolution and milimeter range - researchr publication authors

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Simon Rerucha, Miroslava Holá, Martin Sarbort, Jindrich Oulehla, Bretislav Mikel, Josef Lazar, Ondrej Cíp. Compact interferometric displacement gauge with sub-nanometer resolution and milimeter range. In 2016 IEEE SENSORS, Orlando, FL, USA, October 30 - November 3, 2016. pages 1-3, IEEE, 2016. [doi]

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