Compact interferometric displacement gauge with sub-nanometer resolution and milimeter range

Simon Rerucha, Miroslava Holá, Martin Sarbort, Jindrich Oulehla, Bretislav Mikel, Josef Lazar, Ondrej Cíp. Compact interferometric displacement gauge with sub-nanometer resolution and milimeter range. In 2016 IEEE SENSORS, Orlando, FL, USA, October 30 - November 3, 2016. pages 1-3, IEEE, 2016. [doi]

@inproceedings{ReruchaHSOMLC16,
  title = {Compact interferometric displacement gauge with sub-nanometer resolution and milimeter range},
  author = {Simon Rerucha and Miroslava Holá and Martin Sarbort and Jindrich Oulehla and Bretislav Mikel and Josef Lazar and Ondrej Cíp},
  year = {2016},
  doi = {10.1109/ICSENS.2016.7808489},
  url = {https://doi.org/10.1109/ICSENS.2016.7808489},
  researchr = {https://researchr.org/publication/ReruchaHSOMLC16},
  cites = {0},
  citedby = {0},
  pages = {1-3},
  booktitle = {2016 IEEE SENSORS, Orlando, FL, USA, October 30 - November 3, 2016},
  publisher = {IEEE},
  isbn = {978-1-4799-8287-5},
}