Fast and rigorous use of thermal time constant to characterize back end of the line test structure in advanced technology

Antoine Reverdy, Philippe Perdu, H. Murray, M. de la Bardonnie, P. Poirier. Fast and rigorous use of thermal time constant to characterize back end of the line test structure in advanced technology. Microelectronics Reliability, 48(8-9):1279-1284, 2008. [doi]

Abstract

Abstract is missing.