Machine Learning Based V-ramp VBD Predictive Model Using OCD-measured Fab Parameters for Early Detection of MOL Reliability Risk - researchr publication authors

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SungMan Rhee, Hyunjin Kim, Sangku Park, Taiki Uemura, Yuchul Hwang, Seungjin Choo, Jinju Kim, Hwasung Rhee, Shin-Young Chung. Machine Learning Based V-ramp VBD Predictive Model Using OCD-measured Fab Parameters for Early Detection of MOL Reliability Risk. In IEEE International Reliability Physics Symposium, IRPS 2023, Monterey, CA, USA, March 26-30, 2023. pages 1-4, IEEE, 2023. [doi]

This author has not been identified. Look up 'SungMan Rhee' in GoogleThis author has not been identified. Look up 'Hyunjin Kim' in GoogleThis author has not been identified. Look up 'Sangku Park' in GoogleThis author has not been identified. Look up 'Taiki Uemura' in GoogleThis author has not been identified. Look up 'Yuchul Hwang' in GoogleThis author has not been identified. Look up 'Seungjin Choo' in GoogleThis author has not been identified. Look up 'Jinju Kim' in GoogleThis author has not been identified. Look up 'Hwasung Rhee' in GoogleThis author has not been identified. Look up 'Shin-Young Chung' in Google

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