2-D Acoustic Particle Velocity Sensors Based on a Commercial Post-CMOS MEMS Technology

Andrea Ria, Massimo Piotto, Mattia Cicalini, Andrea Nannini, Paolo Bruschi. 2-D Acoustic Particle Velocity Sensors Based on a Commercial Post-CMOS MEMS Technology. In Sergio Saponara, Alessandro De Gloria, editors, Applications in Electronics Pervading Industry, Environment and Society - APPLEPIES 2019, Pisa, Italy, 11-13 September 2019. Volume 627 of Lecture Notes in Electrical Engineering, pages 225-231, Springer, 2019. [doi]

Abstract

Abstract is missing.