Control of MEMS Vibration Modes With Pulsed Digital Oscillators - Part II: Simulation and Experimental Results

Jordi Ricart, Joan Pons-Nin, Elena Blokhina, Sergi Gorreta, Jorge Hernando, Tomas Manzaneque, Jose Luis Sanchez-Rojas, Orla Feely, Manuel Domínguez Pumar. Control of MEMS Vibration Modes With Pulsed Digital Oscillators - Part II: Simulation and Experimental Results. IEEE Trans. on Circuits and Systems, 57-I(8):1879-1890, 2010. [doi]

Abstract

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