Back-end soft and hard defect monitoring using a single test chip

Fabrice Rigaud, Jean Michel Portal, Hassen Aziza, Didier Née, Julien Vast, Fabrice Argoud, Bertrand Borot. Back-end soft and hard defect monitoring using a single test chip. Microelectronics Reliability, 51(6):1136-1141, 2011. [doi]

Abstract

Abstract is missing.