Optical Lithography Simulation with Focus Variation using Wavelet Transform

Rance Rodrigues, Sandip Kundu. Optical Lithography Simulation with Focus Variation using Wavelet Transform. In VLSI Design 2010: 23rd International Conference on VLSI Design, 9th International Conference on Embedded Systems, Bangalore, India, 3-7 January 2010. pages 387-392, IEEE, 2010. [doi]

Authors

Rance Rodrigues

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Sandip Kundu

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