Rance Rodrigues, Sandip Kundu. Optical Lithography Simulation with Focus Variation using Wavelet Transform. In VLSI Design 2010: 23rd International Conference on VLSI Design, 9th International Conference on Embedded Systems, Bangalore, India, 3-7 January 2010. pages 387-392, IEEE, 2010. [doi]
@inproceedings{RodriguesK10,
title = {Optical Lithography Simulation with Focus Variation using Wavelet Transform},
author = {Rance Rodrigues and Sandip Kundu},
year = {2010},
doi = {10.1109/VLSI.Design.2010.67},
url = {http://doi.ieeecomputersociety.org/10.1109/VLSI.Design.2010.67},
researchr = {https://researchr.org/publication/RodriguesK10},
cites = {0},
citedby = {0},
pages = {387-392},
booktitle = {VLSI Design 2010: 23rd International Conference on VLSI Design, 9th International Conference on Embedded Systems, Bangalore, India, 3-7 January 2010},
publisher = {IEEE},
isbn = {978-0-7695-3928-7},
}