Janna Rodriguez, Dustin D. Gerrard, Grant M. Glaze, Saurabh Chandorkar, Lizmarie Comenecia, Yunhan Chen, Ian B. Flader, Thomas W. Kenny. Direct measurements of anchor damping in MEMS resonators. In 2017 IEEE SENSORS, Glasgow, United Kingdom, October 29 - November 1, 2017. pages 1-3, IEEE, 2017. [doi]
Abstract is missing.