A Miniaturized Low Power Pirani Pressure Sensor Based on Suspended Graphene

Joost Romijn, Sten Vollebregt, Robin J. Dolleman, Manvika Singh, Herre S. J. van der Zant, Peter G. Steeneken, Pasqualina M. Sarro. A Miniaturized Low Power Pirani Pressure Sensor Based on Suspended Graphene. In 13th IEEE Annual International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2018, Singapore, Singapore, April 22-26, 2018. pages 11-14, IEEE, 2018. [doi]

Abstract

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