A deep residual neural network for semiconductor defect classification in imbalanced scanning electron microscope datasets

Francisco López de la Rosa, José L. Gómez-Sirvent, Rafael Morales 0001, Roberto Sánchez-Reolid, Antonio Fernández-Caballero 0001. A deep residual neural network for semiconductor defect classification in imbalanced scanning electron microscope datasets. Appl. Soft Comput., 131:109743, 2022. [doi]

Abstract

Abstract is missing.