Defect detection and classification on semiconductor wafers using two-stage geometric transformation-based data augmentation and SqueezeNet lightweight convolutional neural network

Francisco López de la Rosa, José L. Gómez-Sirvent, Rafael Morales 0001, Roberto Sánchez-Reolid, Antonio Fernández-Caballero 0001. Defect detection and classification on semiconductor wafers using two-stage geometric transformation-based data augmentation and SqueezeNet lightweight convolutional neural network. Computers & Industrial Engineering, 183:109549, September 2023. [doi]

Abstract

Abstract is missing.