Electrostatic discharge failure analysis of capacitive RF MEMS switches

J. Ruan, N. Nolhier, M. Bafleur, L. Bary, Fabio Coccetti, T. Lisec, Robert Plana. Electrostatic discharge failure analysis of capacitive RF MEMS switches. Microelectronics Reliability, 47(9-11):1818-1822, 2007. [doi]

Abstract

Abstract is missing.