A workflow management system for cross-system processes in semiconductor supply chains

Tim Russland, Hans Ehm, Thomas Ponsignon. A workflow management system for cross-system processes in semiconductor supply chains. In 2012 IEEE International Conference on Automation Science and Engineering, CASE 2012, Seoul, Korea (South), August 20-24, 2012. pages 635-640, IEEE, 2012. [doi]

Authors

Tim Russland

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Hans Ehm

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Thomas Ponsignon

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