Thin and Scalable Hybrid Emission Filter via Plasma Etching for Low-Invasive Fluorescence Detection

Erus Rustami, Kiyotaka Sasagawa, Kenji Sugie, Yasumi Ohta, Hironari Takehara, Makito Haruta, Hiroyuki Tashiro, Jun Ohta. Thin and Scalable Hybrid Emission Filter via Plasma Etching for Low-Invasive Fluorescence Detection. Sensors, 23(7):3695, April 2023. [doi]

Abstract

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