Two-photon laser-assisted device alteration in CMOS integrated circuits using linearly, circularly and radially polarized light

M. Rutkauskas, C. Farrell, C. Dorrer, Kara L. Marshall, Tom Crawford, Ted R. Lundquist, P. Vedagarbha, K. Erington, D. Bodoh, Derryck Telford Reid. Two-photon laser-assisted device alteration in CMOS integrated circuits using linearly, circularly and radially polarized light. Microelectronics Reliability, 60:62-66, 2016. [doi]

@article{RutkauskasFDMCL16,
  title = {Two-photon laser-assisted device alteration in CMOS integrated circuits using linearly, circularly and radially polarized light},
  author = {M. Rutkauskas and C. Farrell and C. Dorrer and Kara L. Marshall and Tom Crawford and Ted R. Lundquist and P. Vedagarbha and K. Erington and D. Bodoh and Derryck Telford Reid},
  year = {2016},
  doi = {10.1016/j.microrel.2016.02.007},
  url = {http://dx.doi.org/10.1016/j.microrel.2016.02.007},
  researchr = {https://researchr.org/publication/RutkauskasFDMCL16},
  cites = {0},
  citedby = {0},
  journal = {Microelectronics Reliability},
  volume = {60},
  pages = {62-66},
}