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Two-photon laser-assisted device alteration in CMOS integrated circuits using linearly, circularly and radially polarized light

M. Rutkauskas, C. Farrell, C. Dorrer, Kara L. Marshall, Tom Crawford, Ted R. Lundquist, P. Vedagarbha, K. Erington, D. Bodoh, Derryck Telford Reid. Two-photon laser-assisted device alteration in CMOS integrated circuits using linearly, circularly and radially polarized light. Microelectronics Reliability, 60:62-66, 2016. [doi]

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