Bassam Saadany, Diaa A. Khalil, Tarik Bourouina. Highly Efficient Micromachined Bragg Mirrors Using Advanced DRIE Process. In 2006 International Conference on MEMS, NANO and Smart Systems, ICMENS 2006, Cairo, Egypt, December 27-29, 2006. pages 48-51, IEEE, 2006. [doi]
Abstract is missing.