Design, fabrication and characterization of a zinc oxide thin-film piezoelectric accelerometer

Chinmoy Saayujya, Joel Shi-Quan Tan, Yanhui Yuan, Yoke-Rung Wong, Hejun Du. Design, fabrication and characterization of a zinc oxide thin-film piezoelectric accelerometer. In 2014 IEEE Ninth International Conference on Intelligent Sensors, Sensor Networks and Information Processing (ISSNIP), Singapore, April 21-24, 2014. pages 1-6, IEEE, 2014. [doi]

Abstract

Abstract is missing.