Application of Adaptive Multilevel Substructuring Technique to Model CMOS Micromachined Thermistor Gas Sensor, Part (II): Effect of Manufacturing Uncertainties in the Reliability of MEMS

K. Sadek, Walied A. Moussa. Application of Adaptive Multilevel Substructuring Technique to Model CMOS Micromachined Thermistor Gas Sensor, Part (II): Effect of Manufacturing Uncertainties in the Reliability of MEMS. In 2003 International Conference on MEMS, NANO, and Smart Systems (ICMENS 2003), 20-23 July 2003, Banff, Alberta, Canada. pages 390-395, IEEE Computer Society, 2003. [doi]

Abstract

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