J. T. Sagar, S. R. Burgess, C. McCarthy, X. Li. Elemental characterisation of sub 20 nm structures in devices using new SEM-EDS technology. Microelectronics Reliability, 64:367-369, 2016. [doi]
@article{SagarBML16,
title = {Elemental characterisation of sub 20 nm structures in devices using new SEM-EDS technology},
author = {J. T. Sagar and S. R. Burgess and C. McCarthy and X. Li},
year = {2016},
doi = {10.1016/j.microrel.2016.07.080},
url = {http://dx.doi.org/10.1016/j.microrel.2016.07.080},
researchr = {https://researchr.org/publication/SagarBML16},
cites = {0},
citedby = {0},
journal = {Microelectronics Reliability},
volume = {64},
pages = {367-369},
}