F. Saghaeian, J. Keckes, K. A. Schreiber, T. Mittereder. Design and development of MEMS-based structures for in-situ characterization of thermo-mechanical behaviour of thin metal films. Microelectronics Reliability, 88:829-834, 2018. [doi]
@article{SaghaeianKSM18,
title = {Design and development of MEMS-based structures for in-situ characterization of thermo-mechanical behaviour of thin metal films},
author = {F. Saghaeian and J. Keckes and K. A. Schreiber and T. Mittereder},
year = {2018},
doi = {10.1016/j.microrel.2018.07.005},
url = {https://doi.org/10.1016/j.microrel.2018.07.005},
researchr = {https://researchr.org/publication/SaghaeianKSM18},
cites = {0},
citedby = {0},
journal = {Microelectronics Reliability},
volume = {88},
pages = {829-834},
}