Progress of Binary-Collision-Approximation-Based Simulation for Surface Erosion by Plasma Irradiation

Seiki Saito, Masayuki Tokitani, Hiroaki Nakamura. Progress of Binary-Collision-Approximation-Based Simulation for Surface Erosion by Plasma Irradiation. In Satoshi Tanaka, Kyoko Hasegawa, Rui Xu, Naohisa Sakamoto, Stephen John Turner, editors, AsiaSim 2014 - 14th International Conference on Systems Simulation, Kitakyushu, Japan, October 26-30, 2014. Proceedings. Volume 474 of Communications in Computer and Information Science, pages 176-186, Springer, 2014. [doi]

@inproceedings{SaitoTN14,
  title = {Progress of Binary-Collision-Approximation-Based Simulation for Surface Erosion by Plasma Irradiation},
  author = {Seiki Saito and Masayuki Tokitani and Hiroaki Nakamura},
  year = {2014},
  doi = {10.1007/978-3-662-45289-9_16},
  url = {http://dx.doi.org/10.1007/978-3-662-45289-9_16},
  researchr = {https://researchr.org/publication/SaitoTN14},
  cites = {0},
  citedby = {0},
  pages = {176-186},
  booktitle = {AsiaSim 2014 - 14th International Conference on Systems Simulation, Kitakyushu, Japan, October 26-30, 2014. Proceedings},
  editor = {Satoshi Tanaka and Kyoko Hasegawa and Rui Xu and Naohisa Sakamoto and Stephen John Turner},
  volume = {474},
  series = {Communications in Computer and Information Science},
  publisher = {Springer},
  isbn = {978-3-662-45288-2},
}