Progress of Binary-Collision-Approximation-Based Simulation for Surface Erosion by Plasma Irradiation

Seiki Saito, Masayuki Tokitani, Hiroaki Nakamura. Progress of Binary-Collision-Approximation-Based Simulation for Surface Erosion by Plasma Irradiation. In Satoshi Tanaka, Kyoko Hasegawa, Rui Xu, Naohisa Sakamoto, Stephen John Turner, editors, AsiaSim 2014 - 14th International Conference on Systems Simulation, Kitakyushu, Japan, October 26-30, 2014. Proceedings. Volume 474 of Communications in Computer and Information Science, pages 176-186, Springer, 2014. [doi]

Abstract

Abstract is missing.