Seima Sakaguchi, Yasushi Arimura, Takayuki Yamauchi, Yuichi Tokuyama, Tomoya Kawai, Hidetaka Eguchi, Hiroyuki Morinaga, Hiroharu Kawanaka, Tetsushi Wakabayashi. A Study on Yield Analysis Method Using Classifiers for Semiconductor Manufacturing. In Joint 12th International Conference on Soft Computing and Intelligent Systems and 23rd International Symposium on Advanced Intelligent Systems, SCIS&ISIS 2022, Ise, Japan, November 29 - Dec. 2, 2022. pages 1-4, IEEE, 2022. [doi]
@inproceedings{SakaguchiAYTKEM22,
title = {A Study on Yield Analysis Method Using Classifiers for Semiconductor Manufacturing},
author = {Seima Sakaguchi and Yasushi Arimura and Takayuki Yamauchi and Yuichi Tokuyama and Tomoya Kawai and Hidetaka Eguchi and Hiroyuki Morinaga and Hiroharu Kawanaka and Tetsushi Wakabayashi},
year = {2022},
doi = {10.1109/SCISISIS55246.2022.10002130},
url = {https://doi.org/10.1109/SCISISIS55246.2022.10002130},
researchr = {https://researchr.org/publication/SakaguchiAYTKEM22},
cites = {0},
citedby = {0},
pages = {1-4},
booktitle = {Joint 12th International Conference on Soft Computing and Intelligent Systems and 23rd International Symposium on Advanced Intelligent Systems, SCIS&ISIS 2022, Ise, Japan, November 29 - Dec. 2, 2022},
publisher = {IEEE},
isbn = {978-1-6654-9924-8},
}