A Study on Yield Analysis Method Using Classifiers for Semiconductor Manufacturing

Seima Sakaguchi, Yasushi Arimura, Takayuki Yamauchi, Yuichi Tokuyama, Tomoya Kawai, Hidetaka Eguchi, Hiroyuki Morinaga, Hiroharu Kawanaka, Tetsushi Wakabayashi. A Study on Yield Analysis Method Using Classifiers for Semiconductor Manufacturing. In Joint 12th International Conference on Soft Computing and Intelligent Systems and 23rd International Symposium on Advanced Intelligent Systems, SCIS&ISIS 2022, Ise, Japan, November 29 - Dec. 2, 2022. pages 1-4, IEEE, 2022. [doi]

Abstract

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