Control of the nanopositioning devices

Srinivasa M. Salapaka, Abu Sebastian. Control of the nanopositioning devices. In 42nd IEEE Conference on Decision and Control, CDC 2003, Maui, Hawaii, USA, December 9-12, 2003. pages 3644-3649, IEEE, 2003. [doi]

Authors

Srinivasa M. Salapaka

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Abu Sebastian

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