Extended range of a MEMS electrostatic actuator using an adjustable linear controller

Hatem Samaali, Fehmi Najar. Extended range of a MEMS electrostatic actuator using an adjustable linear controller. In 18th International Multi-Conference on Systems, Signals & Devices, SSD 2021, Monastir, Tunisia, March 22-25, 2021. pages 1166-1171, IEEE, 2021. [doi]

Authors

Hatem Samaali

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Fehmi Najar

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