Extended range of a MEMS electrostatic actuator using an adjustable linear controller

Hatem Samaali, Fehmi Najar. Extended range of a MEMS electrostatic actuator using an adjustable linear controller. In 18th International Multi-Conference on Systems, Signals & Devices, SSD 2021, Monastir, Tunisia, March 22-25, 2021. pages 1166-1171, IEEE, 2021. [doi]

Abstract

Abstract is missing.