Device photolithography: The electron beam pattern generator

W. Samaroo, J. Raamot, P. Parry, G. Robertson. Device photolithography: The electron beam pattern generator. Bell Syst. Tech. J., 49(9):2077-2094, 1970. [doi]

Authors

W. Samaroo

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J. Raamot

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P. Parry

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G. Robertson

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