W. Samaroo, J. Raamot, P. Parry, G. Robertson. Device photolithography: The electron beam pattern generator. Bell Syst. Tech. J., 49(9):2077-2094, 1970. [doi]
@article{SamarooRPR70,
title = {Device photolithography: The electron beam pattern generator},
author = {W. Samaroo and J. Raamot and P. Parry and G. Robertson},
year = {1970},
doi = {10.1002/j.1538-7305.1970.tb02514.x},
url = {https://doi.org/10.1002/j.1538-7305.1970.tb02514.x},
researchr = {https://researchr.org/publication/SamarooRPR70},
cites = {0},
citedby = {0},
journal = {Bell Syst. Tech. J.},
volume = {49},
number = {9},
pages = {2077-2094},
}